Invention Grant
- Patent Title: Line narrowing module, gas laser apparatus, and method for manufacturing electronic devices
-
Application No.: US18167611Application Date: 2023-02-10
-
Publication No.: US12224549B2Publication Date: 2025-02-11
- Inventor: Junichi Maekawa , Hiroshi Furusato
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H01S3/137
- IPC: H01S3/137 ; G03F7/00 ; H01S3/034 ; H01S3/08 ; H01S3/13 ; H01S3/225

Abstract:
A line narrowing module includes an enclosure, a prism which is disposed in an internal space of the enclosure and through which light passes, a mounter which is disposed in the internal space and on which the prism is mounted, a fixing unit which is disposed in the internal space and fixes the prism to the mounter, and a light blocking member. The light blocking member is disposed in the internal space and blocks scattered light in the internal space, the scattered light produced from the light and traveling to the fixing unit.
Public/Granted literature
- US20230187896A1 LINE NARROWING MODULE, GAS LASER APPARATUS, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES Public/Granted day:2023-06-15
Information query