- Patent Title: Ferroelectric capacitor, ferroelectric field effect transistor, and method used in forming an electronic device comprising conductive material and ferroelectric material
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Application No.: US17950023Application Date: 2022-09-21
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Publication No.: US12237112B2Publication Date: 2025-02-25
- Inventor: Manuj Nahar , Ashonita A. Chavan
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01G4/12
- IPC: H01G4/12 ; H01G4/10 ; H01G4/30 ; H01G4/33 ; H01G4/40 ; H01L21/28 ; H01L29/51 ; H01L29/66 ; H01L29/78 ; H01L49/02 ; H10B51/30 ; H10B53/30

Abstract:
A method used in forming an electronic device comprising conductive material and ferroelectric material comprises forming a composite stack comprising multiple metal oxide-comprising insulator materials. At least one of the metal oxide-comprising insulator materials is between and directly against non-ferroelectric insulating materials. The multiple metal oxide-comprising insulator materials are of different composition from that of immediately-adjacent of the non-ferroelectric insulating materials. The composite stack is subjected to a temperature of at least 200° C. After the subjecting, the composite stack comprises multiple ferroelectric metal oxide-comprising insulator materials at least one of which is between and directly against non-ferroelectric insulating materials. After the subjecting, the composite stack is ferroelectric. Conductive material is formed and that is adjacent the composite stack. Devices are also disclosed.
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