Invention Grant
- Patent Title: Semiconductor device
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Application No.: US17207751Application Date: 2021-03-22
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Publication No.: US12249649B2Publication Date: 2025-03-11
- Inventor: Cheng-Han Wu , Hsin-Yu Chen , Chun-Hao Lin , Shou-Wei Hsieh , Chih-Ming Su , Yi-Ren Chen , Yuan-Ting Chuang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: TW107146345 20181221
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/762 ; H01L29/417

Abstract:
A semiconductor device includes a fin-shaped structure on the substrate, a shallow trench isolation (STI) around the fin-shaped structure, a single diffusion break (SDB) structure in the fin-shaped structure for dividing the fin-shaped structure into a first portion and a second portion; a first gate structure on the fin-shaped structure, a second gate structure on the STI, and a third gate structure on the SDB structure. Preferably, a width of the third gate structure is greater than a width of the second gate structure and each of the first gate structure, the second gate structure, and the third gate structure includes a U-shaped high-k dielectric layer, a U-shaped work function metal layer, and a low-resistance metal layer.
Public/Granted literature
- US20210210628A1 SEMICONDUCTOR DEVICE Public/Granted day:2021-07-08
Information query
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