Invention Grant
- Patent Title: Substrate bonding method
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Application No.: US17918038Application Date: 2022-07-28
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Publication No.: US12266623B2Publication Date: 2025-04-01
- Inventor: Yunzhi Ling , Siliang He , Jianguo Ma , Yuhao Bi , Xingyu Liu , Chuan Hu , Zhitao Chen
- Applicant: Shenzhen Xiuyuan Electronic Technology Co., Ltd.
- Applicant Address: CN Shenzhen
- Assignee: Shenzhen Xiuyuan Electronic Technology Co., Ltd.
- Current Assignee: Shenzhen Xiuyuan Electronic Technology Co., Ltd.
- Current Assignee Address: CN Shenzhen
- Agency: Dicke Billig & Czaja, PLLC
- International Application: PCT/CN2022/108718 WO 20220728
- International Announcement: WO2024/020954 WO 20240201
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01R4/58 ; H01R43/00

Abstract:
A substrate bonding method includes: providing a first and a second substrate; forming, on the first substrate, a first metal micro-bump array including first metal pillar(s) formed on the first substrate and first metal nanowires formed thereon and spaced apart from each other; forming, on the second substrate, a second metal micro-bump array including second metal pillar(s) formed on the second substrate and second metal nanowires formed thereon and spaced apart from each other; pressing the first substrate onto the second substrate, such that the first and second metal micro-bump arrays are positioned and staggered with each other, forming a physically interwoven interlocking structure between the first and second metal nanowires; applying a filling material between the first and second substrates; curing the filling material to form a bonding cavity; and then performing confined heating reflux on the first and second metal micro-bump arrays in the bonding cavity.
Public/Granted literature
- US20240038705A1 SUBSTRATE BONDING METHOD Public/Granted day:2024-02-01
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