Invention Application
US20020140334A1 Cathode target mounting for cathodic arc cathodes 有权
用于阴极电弧阴极的阴极靶材安装

Cathode target mounting for cathodic arc cathodes
Abstract:
An apparatus for cathodic arc coating. The apparatus includes: a vacuum chamber which includes an anode; a power supply; and a cathode target assembly connected to the power supply. The cathode target assembly includes a cathode target and a target holder. In the preferred embodiment, a conductive interlayer is located between the cathode target and the target holder, and a cooling block is in contact with the cathode target.
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