Invention Application
- Patent Title: Cathode target mounting for cathodic arc cathodes
- Patent Title (中): 用于阴极电弧阴极的阴极靶材安装
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Application No.: US09825126Application Date: 2001-04-03
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Publication No.: US20020140334A1Publication Date: 2002-10-03
- Inventor: Scott Andrew Weaver , Don Mark Lipkin , Reed Roeder Corderman , Terry Clifford Cooper
- Applicant: General Electric Company
- Applicant Address: null
- Assignee: General Electric Company
- Current Assignee: General Electric Company
- Current Assignee Address: null
- Main IPC: H01J017/26
- IPC: H01J017/26 ; H01J007/24 ; H01J061/28 ; H05B031/26

Abstract:
An apparatus for cathodic arc coating. The apparatus includes: a vacuum chamber which includes an anode; a power supply; and a cathode target assembly connected to the power supply. The cathode target assembly includes a cathode target and a target holder. In the preferred embodiment, a conductive interlayer is located between the cathode target and the target holder, and a cooling block is in contact with the cathode target.
Public/Granted literature
- US06608432B2 Cathode target mounting for cathodic arc cathodes Public/Granted day:2003-08-19
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