公开(公告)号：US20040036397A1

公开(公告)日：2004-02-26

申请号：US10639476

申请日：2003-08-13

Applicant: Plasmion Corporation

Inventor： Steven Kim ,  Dong Woo Yu ,  Seok-Kyun Song ,  Seungdeok Kim

IPC: H01J017/26 ,  H01J061/28

CPC classification number: H01J37/32009 ,  A61L2/14 ,  B08B7/0035 ,  H01J37/32082 ,  H01J37/32532 ,  H05H1/2406 ,  H05H2001/2456

Abstract: A plasma treatment apparatus for a workpiece includes a metal electrode, a capillary dielectric having first and second sides and coupled to the metal electrode through the first side, wherein the capillary dielectric has at least one capillary, a shield body surrounding the metal electrode and the first side of the capillary dielectric, wherein the shield body has first and second end portions, and a gas supplier providing gas to the metal electrode.

Abstract translation: 一种用于工件的等离子体处理装置包括金属电极，具有第一和第二侧的毛细管电介质，并通过第一侧与金属电极耦合，其中毛细管电介质具有至少一个毛细管，围绕金属电极的屏蔽体和 毛细管电介质的第一侧，其中屏蔽体具有第一和第二端部，以及向金属电极提供气体的气体供应器。

公开(公告)号：US20030234610A1

公开(公告)日：2003-12-25

申请号：US10174912

申请日：2002-06-19

Inventor： Keith A. Klinedinst ,  Dennis B. Shinn

IPC: H01J017/26

CPC classification number: H01J61/72

Abstract: A method for inhibiting the leaching of mercury from a mercury vapor discharge lamp having a diameter of less than 1.5 inches wherein at least a part of the mercury is present as ionic mercury includes depositing a coating of SnO2 on an interior surface of the lamp envelope. Further included within the lamp is a quantity of oxidizable iron in an amount equal to at least 1 gram per kilogram of lamp weight.

Abstract translation: 一种用于抑制汞直径小于1.5英寸的汞蒸气放电灯浸出汞的方法，其中至少一部分汞作为离子汞存在包括在灯壳的内表面上沉积SnO 2涂层。 灯内还包括一定量的可氧化铁，其数量等于至少1克/千克灯重量。

公开(公告)号：US20020140334A1

公开(公告)日：2002-10-03

申请号：US09825126

申请日：2001-04-03

Applicant: General Electric Company

Inventor： Scott Andrew Weaver ,  Don Mark Lipkin ,  Reed Roeder Corderman ,  Terry Clifford Cooper

IPC: H01J017/26 ,  H01J007/24 ,  H01J061/28 ,  H05B031/26

CPC classification number: H01J37/32055 ,  H01J37/32724

Abstract: An apparatus for cathodic arc coating. The apparatus includes: a vacuum chamber which includes an anode; a power supply; and a cathode target assembly connected to the power supply. The cathode target assembly includes a cathode target and a target holder. In the preferred embodiment, a conductive interlayer is located between the cathode target and the target holder, and a cooling block is in contact with the cathode target.

Abstract translation: 阴极电弧涂层设备。 该装置包括：真空室，其包括阳极; 电源; 以及连接到电源的阴极靶组件。 阴极靶组件包括阴极靶和目标支架。 在优选实施例中，导电中间层位于阴极靶和靶保持器之间，并且冷却块与阴极靶接触。

公开(公告)号：US20030234611A1

公开(公告)日：2003-12-25

申请号：US10175572

申请日：2002-06-19

Inventor： Keith A. Klinedinst ,  Dennis B. Shinn

IPC: H01J017/26

CPC classification number: H01J61/72

Abstract: A method for inhibiting the leaching of mercury from a mercury vapor discharge lamp wherein at least a part of the mercury is present as ionic mercury includes depositing a coating of SnO2 on an interior surface of the lamp envelope. The SnO2 coating is substantially free of a substance which would cause electrical conductity of the coating. Further included within the lamp is a quantity of oxidizable iron in an amount equal to at least 1 gram per kilogram of lap weight.

Abstract translation: 一种抑制汞蒸气放电灯浸出汞的方法，其中至少一部分汞作为离子汞存在包括在灯壳的内表面上沉积SnO 2涂层。 SnO 2涂层基本上不含导致涂层电导率的物质。 在灯内还包括一定量的可氧化铁，其量等于至少1克/千克的搭接重量。

公开(公告)号：US20030209961A1

公开(公告)日：2003-11-13

申请号：US10410674

申请日：2003-04-09

Applicant: Astrium GmbH

Inventor： Karl-Heinz Schartner ,  Horst Loeb ,  Hans Juergen Leiter ,  Hans-Peter Harmann

IPC: H01J017/26 ,  H01J061/28

CPC classification number: H01J3/025

Abstract: A high-frequency electron source includes a discharge chamber having at least one gas inlet for a gas to be ionized and at least one extraction opening for electrons. The high-frequency electron source also includes a first electrode at least partially surrounding the discharge chamber and a keeper electrode at least partially surround the discharge chamber. The first electrode and the keeper electrode are configured to provide a high-frequency electric field therebetween.

Abstract translation: 高频电子源包括具有至少一个待离子化气体的气体入口和至少一个电子提取开口的放电室。 高频电子源还包括至少部分地围绕放电室的第一电极和至少部分地围绕放电室的保持电极。 第一电极和保持器电极被配置为在它们之间提供高频电场。

公开(公告)号：US20030137229A1

公开(公告)日：2003-07-24

申请号：US10056104

申请日：2002-01-24

Inventor： Aviv Amirav

IPC: H01J017/26

CPC classification number: H01J49/025

Abstract: The invention provides an ion source, including an inlet port for introduction of a sample into the ion source; an outlet port through which an ion beam exits; an ionizer for ionizing the sample; an ion formation chamber confined by an ion cage, and at least one electrical shield for shielding the ion chamber from the penetration of electrical fields affecting the ions inside the chamber.

Abstract translation: 本发明提供了一种离子源，包括用于将样品引入离子源的入口端口; 离子束离开的出口; 用于离子化样品的离子发生器; 由离子笼限制的离子形成室和至少一个用于屏蔽离子室免受影响室内离子的电场穿透的电屏蔽。

公开(公告)号：US20010020823A1

公开(公告)日：2001-09-13

申请号：US09389118

申请日：1999-09-02

Inventor： DAVID KEY DIETRICH ,  DEBORAH ANN HAITKO

IPC: H01J017/26 ,  H01J017/20

CPC classification number: H01J61/72 ,  H01J61/00

Abstract: A method and apparatus for preventing the formation of leachable mercury in mercury arc vapor discharge lamps is provided which comprises coating at least one of the metallic components of the mercury arc vapor discharge lamps with at least one noble metal coating.

Abstract translation: 提供一种用于防止在汞电弧蒸汽放电灯中形成可浸出汞的方法和装置，其包括用至少一种贵金属涂层涂覆汞弧蒸气放电灯的至少一个金属组分。

公开(公告)号：US20030230979A1

公开(公告)日：2003-12-18

申请号：US10064149

申请日：2002-06-14

Applicant: GENERAL ELECTRIC COMPANY

Inventor： Gyula Busai ,  Norbert Benko

IPC: H01J017/26

CPC classification number: H01J7/20 ,  H01J9/395 ,  H01J61/20 ,  H01J61/28

Abstract: A device for retaining a mercury source in the discharge space of a low-pressure discharge lamp is disclosed. The mercury source retaining device comprises a holder, which has an inner space communicating with the discharge space and a receiver opening for receiving a mercury source. The retaining device further comprises resilient clamping means for clamping the holder in a tubular space segment of the discharge space and resilient retaining means at least partially blocking the receiver opening. The resilient retaining means are adapted for allowing a passage of the mercury source in a direction towards the inner space of the holder, but block the movement of the mercury source through the receiver opening in a direction out of the holder.

Abstract translation: 公开了一种用于将汞源保持在低压放电灯的放电空间中的装置。 汞源保持装置包括具有与放电空间连通的内部空间的保持器和用于接收汞源的接收器开口。 保持装置还包括用于将保持器夹持在放电空间的管状空间段中的弹性夹持装置和弹性保持装置，至少部分地阻挡接收器开口。 弹性保持装置适于允许汞源沿着朝向保持器的内部空间的方向通过，但阻止汞源通过接收器开口在保持器外的方向上的移动。

公开(公告)号：US20030042832A1

公开(公告)日：2003-03-06

申请号：US09946331

申请日：2001-09-06

Applicant: Ushio Denki Kabushiki Kaisya

Inventor： Masanori Yamaguchi ,  Masaki Yoshioka

IPC: H01J017/26

CPC classification number: H01J37/30 ,  H01J37/32

Abstract: This invention provides a processing device allowing a plurality of types of processing including electron beam processing to be carried out on a substance disposed in a processing chamber, and processing methods that use such a processing device and allow prescribed processing to be carried out in an advantageous way, the processing device has a processing chamber provided with a support member, an electron beam source provided in the processing chamber and emits an electron beam toward the substance supported by the support member, and an emission gas supply system provided in the processing chamber and supplies an emission gas that emits UV light upon being subjected to an electron beam, moreover, a low pressure system that reduces the pressure in the processing chamber and a process gas supply system that supplies a process gas are preferably provided in the processing chamber, and in the processing methods, such a processing device is used, and by adjusting the pressure in the processing chamber, electron beam processing, UV processing and specific processing using the process gas can be carried out either separately or simultaneously.

Abstract translation: 本发明提供了一种处理装置，其允许对设置在处理室中的物质执行包括电子束处理的多种处理，以及使用这种处理装置并允许以有利的方式执行规定处理的处理方法 处理装置具有设置有支撑构件的处理室，设置在处理室中的电子束源，朝向由支撑构件支撑的物质发射电子束，以及设置在处理室中的发射气体供给系统， 提供在经受电子束时发射紫外线的排放气体，此外，优选地在处理室中设置降低处理室中的压力的​​低压系统和提供处理气体的处理气体供应系统，以及 在处理方法中，使用这样的处理装置，并且通过调节专业的压力 处理室，电子束处理，UV处理和使用工艺气体的具体处理可以单独地或同时进行。

公开(公告)号：US20030020402A1

公开(公告)日：2003-01-30

申请号：US09917367

申请日：2001-07-30

Inventor： Ludwig P. Kiermaier

IPC: H01J009/00 ,  H01J017/26

CPC classification number: H01J9/395

Abstract: A lamp can be built with a collection that includes an electrode adapted to sustain bombardment from a stream of charged particles during an assembly process. The collection includes a metallic electrode shell attached to a supporting electrical lead. A tubular glass body encircling the shell has a rear tube extending away from the shell. The electrical lead is mounted in the glass body. A glass capsule is adapted to fit in the rear tube. The capsule has therein a conductive member that can be confined to the rear tube. The conductive member can be heated in order to open the glass capsule. The capsule contains a substance for delivering mercury upon opening of the capsule. The capsule is locatable in the rear tube at an offset distance from the metallic shell in order to avoid premature mercury delivery during bombardment of the metallic shell during the assembly process. One end of the rear tube can be sealed with the capsule loaded therein. After bombardment the capsule is heated to produce mercury that migrates toward the electrode. The rear tube may then be severed and sealed at a location adjacent the carrier to either excise the capsule or leave it in the rear tube close to the electrode.

Abstract translation: 灯可以用集合构建，其包括适于在组装过程中从带电粒子流维持轰击的电极。 该集合包括附接到支撑电线的金属电极壳。 围绕壳体的管状玻璃体具有远离壳体延伸的后管。 电引线安装在玻璃体内。 玻璃胶囊适合装在后管中。 胶囊中具有可限制于后管的导电构件。 可以加热导电构件以打开玻璃胶囊。 该胶囊含有一种用于在胶囊打开时输送汞的物质。 胶囊可以位于与金属外壳偏离距离的后管中，以避免在装配过程中金属壳轰击时过早的汞输送。 后管的一端可以装载在其中的胶囊密封。 轰击后，将胶囊加热以产生向电极迁移的汞。 然后可以将后管切断并密封在与载体相邻的位置处，以消除胶囊或将其离开靠近电极的后管。