Invention Application
- Patent Title: Spatial optical modulator with passivation layer
- Patent Title (中): 具有钝化层的空间光学调制器
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Application No.: US11591226Application Date: 2006-10-31
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Publication No.: US20070097488A1Publication Date: 2007-05-03
- Inventor: Je-Hong Kyoung , Jae-Wook Jang , Jong-Hyeong Song , Yun-Jin Ko , Seung-Do An
- Applicant: Je-Hong Kyoung , Jae-Wook Jang , Jong-Hyeong Song , Yun-Jin Ko , Seung-Do An
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2006-0097435 20061002; KR10-2006-0097428 20061002; KR10-2005-0123395 20051214; KR10-2005-0104018 20051101
- Main IPC: G02B26/00
- IPC: G02B26/00
Abstract:
Disclosed is an optical modulator including: a substrate; an insulation layer disposed on the substrate; a ribbon layer, a center portion of which is spaced apart from the insulation layer by a predetermined gap; a piezoelectric element that is disposed on the ribbon layer and allows the center portion of the ribbon layer to bend vertically; and a passivation layer that is disposed on the piezoelectric element and comprises a main passivation film.
Public/Granted literature
- US07468825B2 Spatial optical modulator with passivation layer Public/Granted day:2008-12-23
Information query
