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    Optical modulator
    1.
    发明授权
    Optical modulator 失效
    光调制器

    公开(公告)号：US07388701B2

    公开(公告)日：2008-06-17

    申请号：US11639987

    申请日：2006-12-15

    Applicant: Jeong-Suong Yang ,  Yun-Jin Ko ,  Jong-Hyeong Song

    Inventor： Jeong-Suong Yang ,  Yun-Jin Ko ,  Jong-Hyeong Song

    IPC: G02B26/06

    CPC classification number: G02B26/0858 ,  B81B2201/047 ,  B81C1/00793 ,  B81C2201/053 ,  G02B26/0808

    Abstract: An optical modulator having a junction layer is disclosed. An optical modulator may be provided which includes a substrate, an insulation layer positioned on the substrate, a ribbon layer positioned with an intermediate portion spaced apart from the insulation layer by a predetermined distance, a protective layer positioned on both ends of the ribbon layer, a junction layer positioned on the protective layer which has an adhesive property and which prevents the diffusion of gas, and a piezoelectric element joined with the protective layer by way of the junction layer interposed in-between which moves the intermediate portion of the ribbon layer toward and away from the substrate. In certain embodiments of the invention, the light diffraction property and reliability of the overall optical modulator can be maximized, by positioning a junction layer, having improved adhesion and capable of preventing the diffusion of oxygen, on the lower surface of the piezoelectric elements.

    Abstract translation: 公开了一种具有结层的光调制器。 可以提供光调制器，其包括基板，位于基板上的绝缘层，定位在与绝缘层隔开预定距离的中间部分的带层，位于带层两端的保护层， 位于保护层上的接合层，其具有粘合性并且防止气体的扩散;以及压电元件，其通过插入其间的接合层与保护层接合，从而使带状层的中间部分向着 并远离基板。 在本发明的某些实施例中，通过在压电元件的下表面上定位具有改进的附着力并且能够防止氧的扩散的接合层，可以最大化整个光学调制器的光衍射特性和可靠性。

    Thin film actuated mirror including a seeding member and an electrodisplacive member made of materials having the same crystal structure and growth direction
    2.
    发明授权
    Thin film actuated mirror including a seeding member and an electrodisplacive member made of materials having the same crystal structure and growth direction 失效
    薄膜致动反射镜，其包括接合构件和由具有相同晶体结构和生长方向的材料制成的电致位移构件

    公开(公告)号：US6043925A

    公开(公告)日：2000-03-28

    申请号：US107126

    申请日：1998-06-30

    Applicant: Na-Young Ryu ,  Yun-Jin Ko

    Inventor： Na-Young Ryu ,  Yun-Jin Ko

    IPC: G02B26/08 ,  G09F9/37 ,  H04N5/74 ,  G02B26/00

    CPC classification number: G02B26/0833 ,  G02B26/0841

    Abstract: An array of thin film actuated mirrors includes: an active matrix including a substrate, an array of connecting terminals; and an array of actuating structures, each of the actuating structures including an upper electrode functioning as a mirror as well as a common bias electrode, an electrodisplacive member made of a piezoelectric material, a seeding member made of a material having the same crystal structure and growth direction as that of the piezoelectric material constituting the electrodisplacive member, a lower electrode functioning as a signal electrode, an elastic member and a via contact.

    Abstract translation: 薄膜致动反射镜阵列包括：有源矩阵，包括基底，连接端子阵列; 以及一组致动结构，每个致动结构包括用作反射镜的上电极以及公共偏置电极，由压电材料制成的电致位移元件，由具有相同晶体结构的材料制成的接合元件，以及 生长方向与构成电致位移元件的压电材料的生长方向相同，作为信号电极的下部电极，弹性部件和通孔接触。

    Diffractive thin-film piezoelectric light modulator and method of fabricating the same
    3.
    发明授权
    Diffractive thin-film piezoelectric light modulator and method of fabricating the same 失效
    衍射薄膜压电光调制器及其制造方法

    公开(公告)号：US07443076B2

    公开(公告)日：2008-10-28

    申请号：US11112733

    申请日：2005-04-22

    Applicant: Min Suk Oh ,  Yun Jin Ko ,  Jong Sam Kim

    Inventor： Min Suk Oh ,  Yun Jin Ko ,  Jong Sam Kim

    IPC: H01L41/08

    CPC classification number: G02B26/0808 ,  G02B26/0858

    Abstract: Disclosed herein is a diffractive thin-film piezoelectric light modulator, in which a lower protective layer is formed on a lower support to prevent the lower support from being over-etched when etching, thus increasing the surface smoothness of the lower support and of a micro-mirror. In addition, a method of fabricating the diffractive thin-film piezoelectric light modulator is also provided.

    Abstract translation: 本文公开了一种衍射薄膜压电光调制器，其中在下支撑件上形成下保护层以防止在蚀刻时下支撑件被过度蚀刻，从而增加下支撑件和微支架的表面平滑度 -镜子。 此外，还提供了制造衍射薄膜压电光调制器的方法。

    Optical modulator
    4.
    发明申请
    Optical modulator 失效
    光调制器

    公开(公告)号：US20070146859A1

    公开(公告)日：2007-06-28

    申请号：US11639987

    申请日：2006-12-15

    Applicant: Jeong-Suong Yang ,  Yun-Jin Ko ,  Jong-Hyeong Song

    Inventor： Jeong-Suong Yang ,  Yun-Jin Ko ,  Jong-Hyeong Song

    IPC: G02B26/00

    CPC classification number: G02B26/0858 ,  B81B2201/047 ,  B81C1/00793 ,  B81C2201/053 ,  G02B26/0808

    Abstract: An optical modulator having a junction layer is disclosed. An optical modulator may be provided which includes a substrate, an insulation layer positioned on the substrate, a ribbon layer positioned with an intermediate portion spaced apart from the insulation layer by a predetermined distance, a protective layer positioned on both ends of the ribbon layer, a junction layer positioned on the protective layer which has an adhesive property and which prevents the diffusion of gas, and a piezoelectric element joined with the protective layer by way of the junction layer interposed in-between which moves the intermediate portion of the ribbon layer toward and away from the substrate. In certain embodiments of the invention, the light diffraction property and reliability of the overall optical modulator can be maximized, by positioning a junction layer, having improved adhesion and capable of preventing the diffusion of oxygen, on the lower surface of the piezoelectric elements.

    Abstract translation: 公开了一种具有结层的光调制器。 可以提供光调制器，其包括基板，位于基板上的绝缘层，定位在与绝缘层隔开预定距离的中间部分的带层，位于带层两端的保护层， 位于保护层上的接合层，其具有粘合性并且防止气体的扩散;以及压电元件，其通过插入其间的接合层与保护层接合，从而使带状层的中间部分向着 并远离基板。 在本发明的某些实施例中，通过在压电元件的下表面上定位具有改进的附着力并且能够防止氧的扩散的接合层，可以最大化整个光学调制器的光衍射特性和可靠性。

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