Invention Application
US20070154850A1 RESOLUTION ENHANCEMENT IN OPTICAL LITHOGRAPHY VIA ABSORBANCE-MODULATION ENABLED MULTIPLE EXPOSURES 有权
通过吸收调制实现光解决方案的分辨率增强启用多次曝光

  • Patent Title: RESOLUTION ENHANCEMENT IN OPTICAL LITHOGRAPHY VIA ABSORBANCE-MODULATION ENABLED MULTIPLE EXPOSURES
  • Patent Title (中): 通过吸收调制实现光解决方案的分辨率增强启用多次曝光
  • Application No.: US11565051
    Application Date: 2006-11-30
  • Publication No.: US20070154850A1
    Publication Date: 2007-07-05
  • Inventor: Rajesh Menon
  • Applicant: Rajesh Menon
  • Main IPC: G03F7/20
  • IPC: G03F7/20
RESOLUTION ENHANCEMENT IN OPTICAL LITHOGRAPHY VIA ABSORBANCE-MODULATION ENABLED MULTIPLE EXPOSURES
Abstract:
A method to enhance resolution in optical lithography via absorbance-modulation involves exposing an opaque absorbance modulation layer (AML) to a first waveform having wavelength, 81, with the first exposure forming a first set of transparent regions in the opaque AML and forming a first pattern made of a set of exposed regions in a photoresist layer. Next, the AML is restored to its original opaque state. Next, the restored AML is re-exposed to the first waveform having wavelength, 81, with the exposure forming a second set of transparent regions in the opaque AML and forming a second pattern having a set of exposed regions in a photoresist layer. The first and second patterns in the photoresist layer form a final pattern with enhanced resolution and decreased spatial period than the first pattern. In another scenario, instead of exposing the AML to a first waveform, two waveforms are used (the second being complimentary to the first) to ensure that the transmitted image has sharper edges compared to the original image.
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