Invention Application
- Patent Title: METHOD OF FORMING A MICRO DEVICE
- Patent Title (中): 形成微型器件的方法
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Application No.: US11307002Application Date: 2006-01-18
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Publication No.: US20070166649A1Publication Date: 2007-07-19
- Inventor: Cheng-Hung Yu
- Applicant: Cheng-Hung Yu
- Main IPC: G03C5/00
- IPC: G03C5/00
Abstract:
A method of forming a micro device includes using a light source which has a first wavelength beaming to a photo resist which is suited for a second wavelength, developing the photo resist which is suited for the second wavelength to form a plurality of sensitization block, and performing a heating process on the sensitization block to form a micro device.
Information query
