Invention Application
- Patent Title: Epoxy formulations with controllable photospeed
- Patent Title (中): 具有可控制感光度的环氧配方
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Application No.: US12806372Application Date: 2010-08-11
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Publication No.: US20120040288A1Publication Date: 2012-02-16
- Inventor: Timothy Adams , Manuel doCanto , George Cernigliaro
- Applicant: Timothy Adams , Manuel doCanto , George Cernigliaro
- Assignee: MicroChem Corp.
- Current Assignee: MicroChem Corp.
- Main IPC: G03F7/004
- IPC: G03F7/004

Abstract:
The present invention is directed to an epoxy film composition, comprising: novolac resin; solvent; a photoacid generator having the structure A+B− and having a pKa of −5 or less; and a photolabile quencher generator having the structure C+D− and having a pKa greater than −10; wherein B− and D− are different; wherein the amount of the photoacid generator ranges from 0.1 to 7 wt %, based on the total weight of the composition; and wherein the amount of the photolabile quencher generator ranges from 0.1 to 20 wt %, based on the total weight of the photoacid generator. The present invention is also directed to a method of controlling photospeed in a negative photoresist.
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