Invention Application
US20120080596A1 Laser Atom Probe and Laser Atom Probe Analysis Methods 审中-公开
激光原子探针和激光原子探针分析方法

  • Patent Title: Laser Atom Probe and Laser Atom Probe Analysis Methods
  • Patent Title (中): 激光原子探针和激光原子探针分析方法
  • Application No.: US13227505
    Application Date: 2011-09-08
  • Publication No.: US20120080596A1
    Publication Date: 2012-04-05
  • Inventor: Wilfried Vandervorst
  • Applicant: Wilfried Vandervorst
  • Applicant Address: BE Leuven
  • Assignee: IMEC
  • Current Assignee: IMEC
  • Current Assignee Address: BE Leuven
  • Main IPC: H01J37/26
  • IPC: H01J37/26
Laser Atom Probe and Laser Atom Probe Analysis Methods
Abstract:
A laser atom probe system and a method for analysing a specimen by laser atom probe tomography are disclosed. The system includes a specimen holder whereon a specimen to be analyzed may be mounted, the specimen having a tip shape. The system further includes a detector, an electrode arranged between the specimen holder and the detector, and a voltage source configured to apply a voltage difference between the specimen tip and the electrode. The system also includes at least one laser system configured to direct a laser beam laterally at the specimen tip and a tip shape monitoring means configured to detect and monitor the tip shape, and/or a means for altering and/or controlling one or more laser parameters of said laser beam(s) so as to maintain, restore or control said specimen tip shape.
Information query
Patent Agency Ranking
0/0