Invention Application
- Patent Title: Laser Atom Probe and Laser Atom Probe Analysis Methods
- Patent Title (中): 激光原子探针和激光原子探针分析方法
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Application No.: US13227505Application Date: 2011-09-08
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Publication No.: US20120080596A1Publication Date: 2012-04-05
- Inventor: Wilfried Vandervorst
- Applicant: Wilfried Vandervorst
- Applicant Address: BE Leuven
- Assignee: IMEC
- Current Assignee: IMEC
- Current Assignee Address: BE Leuven
- Main IPC: H01J37/26
- IPC: H01J37/26

Abstract:
A laser atom probe system and a method for analysing a specimen by laser atom probe tomography are disclosed. The system includes a specimen holder whereon a specimen to be analyzed may be mounted, the specimen having a tip shape. The system further includes a detector, an electrode arranged between the specimen holder and the detector, and a voltage source configured to apply a voltage difference between the specimen tip and the electrode. The system also includes at least one laser system configured to direct a laser beam laterally at the specimen tip and a tip shape monitoring means configured to detect and monitor the tip shape, and/or a means for altering and/or controlling one or more laser parameters of said laser beam(s) so as to maintain, restore or control said specimen tip shape.
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