Invention Application
- Patent Title: Coherency Reduction for Bandwidth Measurement
- Patent Title (中): 一致性降低带宽测量
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Application No.: US13411600Application Date: 2012-03-04
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Publication No.: US20120162657A1Publication Date: 2012-06-28
- Inventor: Robert J. Rafac , Scot T. Smith
- Applicant: Robert J. Rafac , Scot T. Smith
- Assignee: Cymer, Inc.
- Current Assignee: Cymer, Inc.
- Main IPC: G01J3/45
- IPC: G01J3/45

Abstract:
A method includes directing a portion of a laser beam output from a laser along a secondary beam path toward a detector, the secondary beam path being distinct from a main beam path of the laser beam; generating a bandwidth selective interference pattern of the laser beam on the detector; detecting, at the detector, a width of a fringe within the interference pattern to thereby measure measuring a bandwidth of the laser beam; and homogenizing the laser beam traveling along the secondary beam path prior to generation of the bandwidth selective interference pattern. The homogenizing includes diffusing the laser beam; and introducing a time dependent, position dependent, or both time and position dependent random modulation to the wavefront of the laser beam to reduce fluctuations in the detected fringe width and to reduce the influence of spatial coherence of the laser beam on the detected interference pattern.
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