Invention Application
- Patent Title: MICRO ELECTRO MECHANICAL SYSTEMS COMPONENT AND METHOD OF MANUFACTURING THE SAME
- Patent Title (中): 微电子机械系统组件及其制造方法
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Application No.: US14307259Application Date: 2014-06-17
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Publication No.: US20150344292A1Publication Date: 2015-12-03
- Inventor: Jung Won Lee , Jong Woon Kim , Seung Hun Han , Min Kyu Choi
- Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Applicant Address: KR Suwon-Si
- Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Current Assignee Address: KR Suwon-Si
- Priority: KR10-2013-0069622 20130618
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00

Abstract:
Disclosed herein is a MEMS component including: a membrane; a mass body connected to the membrane; and a support connected to the membrane and supporting the mass body in a floated state to be displaced, wherein the membrane has an upper electrode and an upper piezoelectric material disposed on one side thereof and has a lower electrode and a lower piezoelectric material disposed on the other side thereof, based on an insulating adhesive layer.
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