Invention Application
US20150356989A1 HYBRID-GUIDED BLOCK COPOLYMER ASSEMBLY 有权
混合型嵌段共聚物组件

HYBRID-GUIDED BLOCK COPOLYMER ASSEMBLY
Abstract:
A method for nano-patterning includes imprinting features in a resist with an imprint mold to form one or more topographic surface patterns on the imprinted resist. A block copolymer (“BCP”) material is deposited on the imprinted resist, wherein a molecular dimension L0 of the BCP material correlates by an integer multiple to a spacing dimension of the one or more topographic surface patterns on the imprinted resist. The deposited BCP is annealed and at least a portion of the annealed BCP is removed, forming a template having discrete domains.
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