Invention Application
- Patent Title: HYBRID-GUIDED BLOCK COPOLYMER ASSEMBLY
- Patent Title (中): 混合型嵌段共聚物组件
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Application No.: US14830534Application Date: 2015-08-19
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Publication No.: US20150356989A1Publication Date: 2015-12-10
- Inventor: Yuan Xu , Kim Y. Lee , David S. Kuo , Koichi Wago , Wei Hu
- Applicant: Seagate Technology LLC
- Main IPC: G11B5/84
- IPC: G11B5/84

Abstract:
A method for nano-patterning includes imprinting features in a resist with an imprint mold to form one or more topographic surface patterns on the imprinted resist. A block copolymer (“BCP”) material is deposited on the imprinted resist, wherein a molecular dimension L0 of the BCP material correlates by an integer multiple to a spacing dimension of the one or more topographic surface patterns on the imprinted resist. The deposited BCP is annealed and at least a portion of the annealed BCP is removed, forming a template having discrete domains.
Public/Granted literature
- US09460747B2 Hybrid-guided block copolymer assembly Public/Granted day:2016-10-04
Information query
IPC分类: