Invention Application
US20160013025A1 System and Method for Protection of Vacuum Seals in Plasma Processing Systems
审中-公开
等离子体处理系统中真空密封保护的系统和方法
- Patent Title: System and Method for Protection of Vacuum Seals in Plasma Processing Systems
- Patent Title (中): 等离子体处理系统中真空密封保护的系统和方法
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Application No.: US14771525Application Date: 2014-05-09
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Publication No.: US20160013025A1Publication Date: 2016-01-14
- Inventor: Vladimir Nagorny , Steven Parks , Martin Zucker
- Applicant: MATTSON TECHNOLOGY, INC.
- Applicant Address: US CA Fremont
- Assignee: Mattson Technology, Inc.
- Current Assignee: Mattson Technology, Inc.
- Current Assignee Address: US CA Fremont
- International Application: PCT/US2014/037415 WO 20140509
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
Systems and methods for protecting vacuum seals in a plasma processing system are provided. The processing system can include a vacuum chamber defining a sidewall and an inductive coil wrapped around at least a portion of the sidewall. A vacuum seal can be positioned between the sidewall of the vacuum chamber and a heat sink. A thermally conductive bridge can be coupled between the sidewall and heat sink. Further, the thermally conductive bridge can be positioned relative to the vacuum seal such that the thermally conductive bridge redirects a conductive heat path from the sidewall or any heat source to the heat sink so that the heat path bypasses the vacuum seal.
Public/Granted literature
- US10049858B2 System and method for protection of vacuum seals in plasma processing systems Public/Granted day:2018-08-14
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