Invention Application
US20160013025A1 System and Method for Protection of Vacuum Seals in Plasma Processing Systems 审中-公开
等离子体处理系统中真空密封保护的系统和方法

System and Method for Protection of Vacuum Seals in Plasma Processing Systems
Abstract:
Systems and methods for protecting vacuum seals in a plasma processing system are provided. The processing system can include a vacuum chamber defining a sidewall and an inductive coil wrapped around at least a portion of the sidewall. A vacuum seal can be positioned between the sidewall of the vacuum chamber and a heat sink. A thermally conductive bridge can be coupled between the sidewall and heat sink. Further, the thermally conductive bridge can be positioned relative to the vacuum seal such that the thermally conductive bridge redirects a conductive heat path from the sidewall or any heat source to the heat sink so that the heat path bypasses the vacuum seal.
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