Invention Application
US20160054235A1 SURFACE INSPECTION APPARATUS AND SURFACE INSPECTION METHOD 审中-公开
表面检查装置和表面检查方法

SURFACE INSPECTION APPARATUS AND SURFACE INSPECTION METHOD
Abstract:
Provided are a surface inspection apparatus and a surface inspection method. More particularly, disclosed are a surface inspection apparatus and a surface inspection method to allow for inspection of a foreign material on non-uniformly colored diffusive surfaces containing a metal or polymer material or the like.
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