公开(公告)号：US20160054235A1

公开(公告)日：2016-02-25

申请号：US14552188

申请日：2014-11-24

Applicant: KOREA AEROSPACE RESEARCH INSTITUTE

Inventor： Hyun Woo KIM ,  Jeong Hwan KO ,  Eui Seung CHUNG

IPC: G01N21/94 ,  G01N21/88 ,  G01N21/95

CPC classification number: G01N21/94 ,  G01N21/8806 ,  G01N21/95 ,  G01N2021/8829 ,  G01N2201/0633 ,  G01N2201/0638

Abstract: Provided are a surface inspection apparatus and a surface inspection method. More particularly, disclosed are a surface inspection apparatus and a surface inspection method to allow for inspection of a foreign material on non-uniformly colored diffusive surfaces containing a metal or polymer material or the like.

Abstract translation: 提供了表面检查装置和表面检查方法。 更具体地，公开了一种表面检查装置和表面检查方法，以允许在含有金属或聚合物材料等的非均匀着色的漫射表面上检查异物。