Invention Application
- Patent Title: Open Plasma Lamp for Forming a Light-Sustained Plasma
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Application No.: US15043804Application Date: 2016-02-15
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Publication No.: US20160163516A1Publication Date: 2016-06-09
- Inventor: Lauren Wilson , Anant Chimmalgi , Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine , Gildardo Delgado
- Applicant: KLA-Tencor Corporation
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01J65/04

Abstract:
An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.
Public/Granted literature
- US09721761B2 Open plasma lamp for forming a light-sustained plasma Public/Granted day:2017-08-01
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