Invention Application
- Patent Title: EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Patent Title (中): 极光紫外线发光装置
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Application No.: US15017000Application Date: 2014-09-17
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Publication No.: US20160234920A1Publication Date: 2016-08-11
- Inventor: Toru SUZUKI , Tamotsu ABE , Osamu WAKABAYASHI , Tatsuya YANAGIDA
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi-ken
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi-ken
- Priority: JP2013-192036 20130917
- International Application: PCT/JP2014/074594 WO 20140917
- Main IPC: H05G2/00
- IPC: H05G2/00

Abstract:
An extreme ultraviolet light generation apparatus may include: a chamber including a plasma generation region to which a target is supplied, the target being turned into plasma so that extreme ultraviolet light is generated in the chamber; a target supply part configured to supply the target to the plasma generation region by outputting the target as a droplet into the chamber; a droplet detector configured to detect the droplet traveling from the target supply part to the plasma generation region; an imaging part configured to capture an image of an imaging region containing the plasma generation region in the chamber; and a controller configured to control an imaging timing at which the imaging part captures the image of the imaging region, based on a detection timing at which the droplet detector detects the droplet.
Public/Granted literature
- US09986629B2 Extreme ultraviolet light generation apparatus Public/Granted day:2018-05-29
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