Invention Application
US20160329367A1 BACK SIDE ILLUMINATED CMOS IMAGE SENSOR ARRAYS 有权
背面照明CMOS图像传感器阵列

  • Patent Title: BACK SIDE ILLUMINATED CMOS IMAGE SENSOR ARRAYS
  • Patent Title (中): 背面照明CMOS图像传感器阵列
  • Application No.: US15134181
    Application Date: 2016-04-20
  • Publication No.: US20160329367A1
    Publication Date: 2016-11-10
  • Inventor: HIROFUMI KOMORIJINGYI BAI
  • Applicant: CISTA SYSTEM CORP.
  • Main IPC: H01L27/146
  • IPC: H01L27/146
BACK SIDE ILLUMINATED CMOS IMAGE SENSOR ARRAYS
Abstract:
An image sensor including at least one pixel for collecting charge in its photodiode is provided. The image sensor comprises: a substrate having a first surface on a front side and a second surface on a back side, a photodetector formed in the silicon substrate and having a light-receiving surface on the second surface, and a first layer with positive charges disposed on the second surface, the first layer being configured to form an electron accumulation region at the light-receiving surface of the photodetector for suppressing a dark current at a back side interface of the image sensor. A method for fabricating an image sensor including a first layer with positive charges is also provided.
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