Invention Application
US20160363445A1 CONFIGURATION TO REDUCE NON-LINEAR MOTION 有权
配置减少非线性运动

  • Patent Title: CONFIGURATION TO REDUCE NON-LINEAR MOTION
  • Patent Title (中): 配置减少非线性运动
  • Application No.: US14495786
    Application Date: 2014-09-24
  • Publication No.: US20160363445A1
    Publication Date: 2016-12-15
  • Inventor: Ozan ANACJoseph SEEGER
  • Applicant: InvenSense, Inc.
  • Main IPC: G01C19/5762
  • IPC: G01C19/5762
CONFIGURATION TO REDUCE NON-LINEAR MOTION
Abstract:
Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2nd harmonic motion is minimized
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