Invention Application
- Patent Title: PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND MOBILE BODY
- Patent Title (中): 物理量传感器，电子设备和移动体
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Application No.: US15195055Application Date: 2016-06-28
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Publication No.: US20170010300A1Publication Date: 2017-01-12
- Inventor: Shota KIGURE , Satoru TANAKA
- Applicant: Seiko Epson Corporation
- Priority: JP2015-138780 20150710
- Main IPC: G01P15/125
- IPC: G01P15/125
Abstract:
A physical quantity sensor includes a movable electrode side fixed section, a first fixed electrode side fixed section which has a first fixed electrode section and a second fixed electrode side fixed section which has a second fixed electrode section, a movable mass section which has a first movable electrode section that has a portion facing the first fixed electrode section and a second movable electrode section that has a portion facing the second fixed electrode section and which is formed in a shape that encloses the movable electrode side fixed section, the first fixed electrode side fixed section, and the second fixed electrode side fixed section in planar view, and an elastic section which connects the movable electrode side fixed section and the movable mass section.
Public/Granted literature
- US10151771B2 Physical quantity sensor having a frame-shaped movable mass, electronic device, and mobile body Public/Granted day:2018-12-11
Information query
IPC分类:
