Invention Application
- Patent Title: INSTANTANEOUS PHASE-SHIFT INTERFEROMETER
- Patent Title (中): 瞬态相移干涉仪
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Application No.: US15190912Application Date: 2016-06-23
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Publication No.: US20170016711A1Publication Date: 2017-01-19
- Inventor: Kazuhiko KAWASAKI , Shinpei MATSUURA
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kanagawa
- Priority: JP2015-140397 20150714
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/24

Abstract:
An instantaneous phase-shift interferometer uses a light source having a coherence length shorter than a difference in optical path length between the light reflected from a reference surface and the light reflected from a measured surface. A beam from the light source is split and, using an adjustable delay optical path, a first beam is delayed to cause a difference in optical path length and is superimposed on the same optical axis as a second beam, after which the reference beam and the measurement beam are generated. The optical path length of the delay optical path is changed during adjustment, a plurality of interference fringe images are individually captured, and at least one of a bias, amplitude, and phase shift amount of the interference fringes obtained in each of the interference fringe images is calculated. A shape of a measured object is measured based on bias calculation results, amplitude calculation results, and phase shift amount calculation results.
Public/Granted literature
- US10088291B2 Instantaneous phase-shift interferometer Public/Granted day:2018-10-02
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