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公开(公告)号：US20170016711A1
公开(公告)日：2017-01-19
申请号：US15190912
申请日：2016-06-23
Applicant: MITUTOYO CORPORATION
Inventor： Kazuhiko KAWASAKI , Shinpei MATSUURA
CPC classification number: G01B9/0201 , G01B9/02 , G01B9/02027 , G01B11/24 , G01B11/2441 , G01B2290/70
Abstract: An instantaneous phase-shift interferometer uses a light source having a coherence length shorter than a difference in optical path length between the light reflected from a reference surface and the light reflected from a measured surface. A beam from the light source is split and, using an adjustable delay optical path, a first beam is delayed to cause a difference in optical path length and is superimposed on the same optical axis as a second beam, after which the reference beam and the measurement beam are generated. The optical path length of the delay optical path is changed during adjustment, a plurality of interference fringe images are individually captured, and at least one of a bias, amplitude, and phase shift amount of the interference fringes obtained in each of the interference fringe images is calculated. A shape of a measured object is measured based on bias calculation results, amplitude calculation results, and phase shift amount calculation results.
Abstract translation: 瞬时相移干涉仪使用相干长度短于从参考表面反射的光与从测量表面反射的光之间的光程长度差异的光源。 来自光源的光束被分离，并且使用可调延迟光路，第一光束被延迟以引起光路长度的差异，并且与第二光束重叠在相同的光轴上，之后参考光束和 生成测量光束。 在调整期间改变延迟光路的光程长度，分别捕获多个干涉条纹图像，并且在每个干涉条纹图像中获得的干涉条纹的偏移，幅度和相移量中的至少一个 被计算。 基于偏差计算结果，振幅计算结果和相移量计算结果测量被测物体的形状。
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公开(公告)号：US20190073784A1
公开(公告)日：2019-03-07
申请号：US16116159
申请日：2018-08-29
Applicant: MITUTOYO CORPORATION
Inventor： Shinpei MATSUURA
Abstract: An image processing apparatus includes an image acquisition part that acquires a plurality of measured images by capturing an object to be measured; a modeling part that identifies a modeled parameter based on the measured images; an intermediate image generation part that generates an intermediate image for generating a geometry image indicating a geometry of the object to be measured based on the modeled parameter; a noise threshold image generation part that generates a noise threshold image by identifying a noise threshold value of each pixel in the intermediate image using statistics indicating an error between the pixel values of pixels included in the data sequence and approximation values of pixels identified based on the modeled parameter for each pixel; and a noise removing part that performs thresholding on the intermediate image using the noise threshold image.
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3.发明申请公开(公告)号：US20190073782A1
公开(公告)日：2019-03-07
申请号：US16116089
申请日：2018-08-29
Applicant: MITUTOYO CORPORATION
Inventor： Shinpei MATSUURA
Abstract: An image processing apparatus includes an image acquisition part that acquires a plurality of different measured images, a modeling part that identifies, for each pixel, a modeled parameter approximating an approximation function of a data sequence where pixel values of pixels corresponding to the respective measured images are placed in an order of capturing, a reconstructed image generation part that generates reconstructed images which are images corresponding to the respective measured images and reconstructed with an approximation value of each pixel identified based on the modeled parameter of each pixel, and an image changing part that changes the pixel values of the measured images based on statistics of the pixel values of the measured images and that of the corresponding reconstructed images.
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