Invention Application
- Patent Title: METHOD FOR MANUFACTURING A MEMS ELEMENT
- Patent Title (中): 制造MEMS元件的方法
-
Application No.: US15253345Application Date: 2016-08-31
-
Publication No.: US20170059321A1Publication Date: 2017-03-02
- Inventor: Joerg BRAEUER , Christian HOEPPNER , Lars TEBJE
- Applicant: Robert Bosch GmbH
- Priority: DE102015216799.2 20150902
- Main IPC: G01C19/5712
- IPC: G01C19/5712 ; B81C1/00 ; B81B3/00
Abstract:
A method for manufacturing a MEMS element, including the following: forming a least one stationary weight element and at least one moving weight element in the MEMS element, and positioning at least one fixing element at the stationary weight element and at the moving weight element, the fixing element being formed so as to be able to be severed.
Public/Granted literature
- US10775170B2 Method for manufacturing a MEMS element Public/Granted day:2020-09-15
Information query
