Invention Application
US20170059777A1 ON-CHIP OPTICAL FILTER COMPRISING FABRI-PEROT RESONATOR STRUCTURE AND SPECTROMETER
有权
包含FABRI-PEROT谐振器结构和光谱仪的片上光学滤波器
- Patent Title: ON-CHIP OPTICAL FILTER COMPRISING FABRI-PEROT RESONATOR STRUCTURE AND SPECTROMETER
- Patent Title (中): 包含FABRI-PEROT谐振器结构和光谱仪的片上光学滤波器
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Application No.: US15249608Application Date: 2016-08-29
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Publication No.: US20170059777A1Publication Date: 2017-03-02
- Inventor: Seunghoon HAN , Yu HORIE , Andrei FARAON , Amir ARBABI
- Applicant: SAMSUNG ELECTRONICS CO., LTD. , CALIFORNIA INSTITUTE OF TECHNOLOGY
- Applicant Address: KR Suwon-si US CA Pasadena
- Assignee: SAMSUNG ELECTRONICS CO., LTD.,CALIFORNIA INSTITUTE OF TECHNOLOGY
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.,CALIFORNIA INSTITUTE OF TECHNOLOGY
- Current Assignee Address: KR Suwon-si US CA Pasadena
- Priority: KR10-2016-0057826 20160511
- Main IPC: G02B6/293
- IPC: G02B6/293 ; G01J3/18 ; G02B5/18
Abstract:
An on-chip optical filter having Fabri-Perot resonators and a spectrometer may include a first sub-wavelength grating (SWG) reflecting layer and a second SWG reflecting layer facing each other. A plurality of Fabri-Perot resonators are formed by the first SWG reflecting layer and the second SWG reflecting layer facing each other. Each of the Fabri-Perot resonators may transmit light corresponding to a resonance wavelength of the Fabri-Perot resonator. The resonance wavelengths of the Fabri-Perot resonators may be determined according to duty cycles of grating patterns.
Public/Granted literature
- US09939587B2 On-chip optical filter comprising Fabri-Perot resonator structure and spectrometer Public/Granted day:2018-04-10
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