Invention Application
- Patent Title: Cryostation System
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Application No.: US15129990Application Date: 2015-04-02
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Publication No.: US20170213693A1Publication Date: 2017-07-27
- Inventor: Yasuhira NAGAKUBO , Toshiyuki IWAHORI
- Applicant: Hitachi High-Technologies Corporation
- Priority: JP2014-076620 20140403
- International Application: PCT/JP2015/060525 WO 20150402
- Main IPC: H01J37/20
- IPC: H01J37/20 ; F25D21/04 ; B01L7/04 ; G01N1/42 ; B01L7/00 ; F25D3/10 ; G01N1/28

Abstract:
The present invention stores a cooled sample subjected to freezing treatment, or the like, while preventing the formation of condensation and frost-like substances and loads the sample into a sample holder for observation using a charged particle beam device. The present invention is provided with a main body for storing a sample and a lid unit mounted above the main body and is characterized in that the main body is divided into a first space and a second space by a partition member; the first space accommodates a cooling medium for cooling the sample; the second space has, disposed therein, a heating unit for heating the cooling medium accommodated in the first space; and the lid unit has, formed therein, a discharge port for discharging the gas generated by the heating of the cooling medium to the outside.
Public/Granted literature
- US10658150B2 Cryostation system Public/Granted day:2020-05-19
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