Invention Application
- Patent Title: MEMS TUNABLE VCSEL POWERED SWEPT SOURCE OCT FOR 3D METROLOGY APPLICATIONS
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Application No.: US15469036Application Date: 2017-03-24
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Publication No.: US20170276471A1Publication Date: 2017-09-28
- Inventor: James JIANG , Alex CABLE
- Applicant: Thorlabs, Inc.
- Main IPC: G01B11/00
- IPC: G01B11/00 ; G01B11/06 ; G01B9/02

Abstract:
Disclosed is an optical probe system that is capable of high speed, high precision, and high resolution 3D digitalization of engineered objects. The 3D dimensional data of the engineered object is measured using a swept source optical coherence tomography system with improved speed, spatial resolutions, and depth range. Also disclosed is a type of coordinate measurement machine (CMM) that is capable of performing high speed, high resolution, and non-contact measurement of engineered objects. The mechanic stylus in the touch-trigger probe of a conventional CMM is replaced with an optical stylus with reconfigurable diameter and length. The distance from the center of the optical stylus to the measurement probe is optically adjusted to match the height of the object to be measured quickly, which eliminates one dimensional movement of the probe and greatly improves the productivity.
Public/Granted literature
- US10557701B2 MEMS tunable VCSEL powered swept source OCT for 3D metrology applications Public/Granted day:2020-02-11
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