Invention Application
- Patent Title: DC Magnetron Sputtering
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Application No.: US15478283Application Date: 2017-04-04
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Publication No.: US20170294294A1Publication Date: 2017-10-12
- Inventor: SCOTT HAYMORE , AMIT RASTOGI , RHONDA HYNDMAN , STEVE BURGESS , IAN MONCRIEFF , CHRIS KENDAL
- Applicant: SPTS TECHNOLOGIES LIMITED
- Priority: GB1606115.2 20160411
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/06 ; C23C14/50 ; C23C14/35 ; H01J37/32 ; C23C14/34

Abstract:
A DC magnetron sputtering apparatus is for depositing a film on a substrate. The apparatus includes a chamber, a substrate support positioned within the chamber, a DC magnetron, and an electrical signal supply device for supplying an electrical bias signal that, in use, causes ions to bombard a substrate positioned on the substrate support. The substrate support includes a central region surrounded by an edge region, the central region being raised with respect to the edge region.
Public/Granted literature
- US11008651B2 DC magnetron sputtering Public/Granted day:2021-05-18
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