Invention Application
- Patent Title: METHOD FOR PRODUCING A SUBSTRATE STRUCTURED BY NANOWIRES, PRODUCED SUBSTRATE, AND USE OF THE SUBSTRATE
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Application No.: US15537545Application Date: 2015-12-14
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Publication No.: US20170348727A1Publication Date: 2017-12-07
- Inventor: Steffen STREHLE , Daniel Markus ROSSKOPF , Andreas Magnus PROBST
- Applicant: UNIVERSITÄT ULM
- Applicant Address: DE Ulm
- Assignee: UNIVERSITÄT ULM
- Current Assignee: UNIVERSITÄT ULM
- Current Assignee Address: DE Ulm
- Priority: DE102014226649.1 20141219
- International Application: PCT/EP2015/079605 WO 20151214
- Main IPC: B05D1/28
- IPC: B05D1/28 ; H05K3/12 ; B81C1/00 ; H05K1/03 ; H05K1/09

Abstract:
The invention relates to a method for producing a substrate structured by nanowires, characterized in that no lubricant and no lithographic resist mask is used in the method, and only by moving a donor substrate having nanowires relative to a substrate and by locally tribological properties on the surface of the substrate, a specified number of nanowires is deposited selectively at locally defined points of the substrate. The invention further relates to a substrate that can be produced using the method according to the invention, and which selectively contains a specified number of nanowires on a surface at locally defined points. The invention further relates to the use of the substrate according to the invention in microelectronics, microsystems technology, and/or micro-sensor systems.
Public/Granted literature
- US10384230B2 Method for producing a substrate structured by nanowires, produced substrate, and use of the substrate Public/Granted day:2019-08-20
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