Invention Application
- Patent Title: POWER DELIVERY FOR HIGH POWER IMPULSE MAGNETRON SPUTTERING (HiPIMS)
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Application No.: US15691157Application Date: 2017-08-30
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Publication No.: US20180108519A1Publication Date: 2018-04-19
- Inventor: VIACHSLAV BABAYAN , ADOLPH MILLER ALLEN , MICHAEL STOWELL , ZHONG QIANG HUA , CARL R. JOHNSON , VANESSA FAUNE , JINGJING LIU
- Applicant: APPLIED MATERIALS, INC.
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/34 ; C23C14/35 ; H01B9/02

Abstract:
A system for the generation and delivery of a pulsed, high voltage signal for a process chamber includes a remotely disposed high voltage supply to generate a high voltage signal, a pulser disposed relatively closer to the process chamber than the high voltage supply, a first shielded cable to deliver the high voltage signal from the remotely disposed high voltage supply to the pulser to be pulsed, and a second shielded cable to deliver a pulsed, high voltage signal from the pulser to the process chamber. A method for generating and delivering a pulsed, high voltage signal to a process chamber includes generating a high voltage signal at a location remote from the process chamber, delivering the high voltage signal to a location relatively closer to the process chamber be pulsed, pulsing the delivered, high voltage signal, and delivering the pulsed, high voltage signal to the process chamber.
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