Invention Application
- Patent Title: Sample Transport Device With Integrated Metrology
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Application No.: US16280145Application Date: 2019-02-20
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Publication No.: US20190295874A1Publication Date: 2019-09-26
- Inventor: Giampietro Bieli , Robert Tas , Kevin O'Brien , Shankar Krishnan , Joshua Butler
- Applicant: KLA-Tencor Corporation
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G01J3/447 ; G01N21/21 ; G01N21/88 ; G01N21/55 ; G01B11/06 ; H01L21/677
Abstract:
A metrology system may include one or more casings that fit within an interior cavity of a sample transport device, an illumination source within one of the one or more casings, one or more illumination optics within one of the one or more casings for directing illumination from the illumination source to a sample located in the interior cavity of the sample transport device, one or more collection optics within one of the one or more casings for light from the sample in response to the illumination from the illumination source, and one or more detectors within one of the one or more casings for generating metrology data based on at least a portion of the light collected by the one or more collection optics.
Public/Granted literature
- US11056366B2 Sample transport device with integrated metrology Public/Granted day:2021-07-06
Information query
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