Invention Application
- Patent Title: Optical Module, Electronic Device, And Driving Method
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Application No.: US16788602Application Date: 2020-02-12
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Publication No.: US20200183146A1Publication Date: 2020-06-11
- Inventor: Tomonori MATSUSHITA , Nozomu HIROKUBO
- Applicant: Seiko Epson Corporation
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@75c75b00
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G01J3/02 ; G01J3/50 ; G01J3/42 ; G01J3/32 ; G01J3/28 ; G01J3/10 ; G01J3/06 ; G01J3/26

Abstract:
An optical module includes a wavelength variable interference filter having a fixed reflective film, a movable reflective film which faces the fixed reflective film with a gap between reflective films interposed therebetween, and an electrostatic actuator that changes the gap between reflective films, and a gap control unit that controls the electrostatic actuator. The gap control unit controls the electrostatic actuator on the basis of an order which is set in accordance with a wavelength to be measured, and changes the gap between the reflective films.
Public/Granted literature
- US11029509B2 Optical module, electronic device, and driving method Public/Granted day:2021-06-08
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