Invention Application
- Patent Title: CONTAMINANT DETECTION TOOLS AND RELATED METHODS
-
Application No.: US17456338Application Date: 2021-11-23
-
Publication No.: US20220084858A1Publication Date: 2022-03-17
- Inventor: David Palsulich , Nicholas A. Wieber
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/02 ; H01J49/10 ; H01L21/66
Abstract:
A method of contaminant detection comprises exposing a wafer comprising one or more contaminants to microdroplets of an oxidizer to form an oxide on a surface of the wafer, exposing the oxide to an etchant to remove the oxide and leave the one or more contaminants on the surface of the wafer, and determining a composition of the one or more contaminants. Additional methods and related tools are also disclosed.
Public/Granted literature
- US11742230B2 Contaminant detection tools including nebulizer and related methods Public/Granted day:2023-08-29
Information query
IPC分类:
