Invention Application
- Patent Title: PHYSICAL QUANTITY SENSOR
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Application No.: US17442269Application Date: 2020-02-19
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Publication No.: US20220155072A1Publication Date: 2022-05-19
- Inventor: Takanori AOYAGI , Hiroyuki AIZAWA , Chunzhi DONG , Shinichi KISHIMOTO
- Applicant: Panasonic Intellectual Property Management Co., Ltd.
- Applicant Address: JP Osaka
- Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee Address: JP Osaka
- Priority: JP2019-061934 20190327
- International Application: PCT/JP2020/006639 WO 20200219
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01P15/18 ; G01P15/12
Abstract:
A physical quantity sensor includes a substrate, an anchor portion, a surrounding portion, a detecting element, a moving portion, and a beam portion. The anchor portion is formed on the same side as a principal surface of the substrate and fixed to the substrate. The surrounding portion is formed on the same side as the principal surface of the substrate and surrounds the anchor portion. The detecting element detects a physical quantity as a target of detection. The moving portion is provided with at least a part of the detecting element, formed on the same side as the principal surface of the substrate, and connected to the surrounding portion. The beam portion is formed on the same side as the principal surface of the substrate and connects the anchor portion and the surrounding portion together.
Public/Granted literature
- US11680797B2 Physical quantity sensor Public/Granted day:2023-06-20
Information query
