公开(公告)号：US20220155072A1

公开(公告)日：2022-05-19

申请号：US17442269

申请日：2020-02-19

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Takanori AOYAGI ,  Hiroyuki AIZAWA ,  Chunzhi DONG ,  Shinichi KISHIMOTO

IPC: G01C19/56 ,  G01P15/18 ,  G01P15/12

Abstract: A physical quantity sensor includes a substrate, an anchor portion, a surrounding portion, a detecting element, a moving portion, and a beam portion. The anchor portion is formed on the same side as a principal surface of the substrate and fixed to the substrate. The surrounding portion is formed on the same side as the principal surface of the substrate and surrounds the anchor portion. The detecting element detects a physical quantity as a target of detection. The moving portion is provided with at least a part of the detecting element, formed on the same side as the principal surface of the substrate, and connected to the surrounding portion. The beam portion is formed on the same side as the principal surface of the substrate and connects the anchor portion and the surrounding portion together.

公开(公告)号：US20230258456A1

公开(公告)日：2023-08-17

申请号：US18002005

申请日：2021-06-24

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Shinichi KISHIMOTO

IPC: G01C21/28 ,  G01C21/16 ,  G01C21/18 ,  G01C19/5776

CPC classification number: G01C21/28 ,  G01C21/166 ,  G01C21/18 ,  G01C19/5776

Abstract: An inertial sensor includes: a plurality of inertial force detection elements each configured to output an output signal corresponding to a detected inertial force; and a processor configured to execute processing relating to the output signal from each of the plurality of inertial force detection elements. The plurality of inertial force detection elements include a first inertial force detection element and a second inertial force detection element. A detection range of the first inertial force detection element and a detection range of the second inertial force detection element are different from each other. A sensitivity of the first inertial force detection element and a sensitivity of the second inertial force detection element are different from each other.

公开(公告)号：US20230236015A1

公开(公告)日：2023-07-27

申请号：US18001990

申请日：2021-06-24

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Shinichi KISHIMOTO

IPC: G01C21/16 ,  G01C21/18 ,  G01C21/20

CPC classification number: G01C21/166 ,  G01C21/18 ,  G01C21/183 ,  G01C21/20

Abstract: An inertial sensor includes: a plurality of inertial force detection elements each configured to output an output signal corresponding to a detected inertial force; and a processor configured to execute processing relating to the output signal from each of the plurality of inertial force detection elements. The plurality of inertial force detection elements includes: a plurality of main inertial force detection elements configured to detect inertial forces of a plurality of first predetermined axes orthogonal to each other; and a sub-inertial force detection element configured to detect an inertial force of a second predetermined axis which intersects the plurality of first predetermined axes such that the second predetermined axis is orthogonal to none of the plurality of first predetermined axes.