Invention Application
- Patent Title: MINIMAL CONTACT GRIPPING OF THIN OPTICAL DEVICES
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Application No.: US17237533Application Date: 2021-04-22
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Publication No.: US20220161396A1Publication Date: 2022-05-26
- Inventor: Yaseer Arafath AHAMED , Kangkang WANG , Benjamin B. RIORDON , James D. STRASSNER , Ludovic GODET
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: B25B11/00
- IPC: B25B11/00

Abstract:
Embodiments described herein provide for devices and methods for retaining optical devices. The devices and methods described herein provide for retention of the substrate without contacting sensitive portions of the substrate. The devices and methods utilize retention pads or vacuum pins to contact the exclusion zones i.e., inactive areas of the substrate to retain the substrate and prevent the substrate from moving laterally. Additionally, a holding force retains the substrate in the vertical direction, without contacting the substrate. The methods provide for adjusting the devices to account for multiple geometries of the substrate. The methods further provide for adjusting the devices, such as adjusting a gap between the optical device and a suction pad, to alter the holding force of the devices on the optical devices.
Public/Granted literature
- US11524392B2 Minimal contact gripping of thin optical devices Public/Granted day:2022-12-13
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