公开(公告)号：US20230094653A1

公开(公告)日：2023-03-30

申请号：US18061327

申请日：2022-12-02

Applicant: Applied Materials, Inc.

Inventor： Yaseer Arafath AHAMED ,  Kangkang WANG ,  Benjamin B. RIORDON ,  James D. STRASSNER ,  Ludovic GODET

IPC: B25B11/00

Abstract: Embodiments described herein provide for devices and methods for retaining optical devices. The devices and methods described herein provide for retention of the substrate without contacting sensitive portions of the substrate. The devices and methods utilize retention pads or vacuum pins to contact the exclusion zones i.e., inactive areas of the substrate to retain the substrate and prevent the substrate from moving laterally. Additionally, a holding force retains the substrate in the vertical direction, without contacting the substrate. The methods provide for adjusting the devices to account for multiple geometries of the substrate. The methods further provide for adjusting the devices, such as adjusting a gap between the optical device and a suction pad, to alter the holding force of the devices on the optical devices.

公开(公告)号：US20230260824A1

公开(公告)日：2023-08-17

申请号：US18103302

申请日：2023-01-30

Applicant: Applied Materials, Inc.

Inventor： James D. STRASSNER

IPC: H01L21/687 ,  B32B3/26 ,  B32B9/04 ,  B32B7/12

CPC classification number: H01L21/68785 ,  B32B3/266 ,  B32B9/04 ,  B32B7/12 ,  B32B2307/732

Abstract: A substrate carrier and methods of assembling the substrate carrier are described herein. The substrate carrier includes a plurality of vacuum transfer channels to vacuum chuck a bottom of a substrate. The plurality of vacuum transfer channels reduce the radial position of the vacuum to enable vacuum chucking of the substrate from a radially outward vacuum position to an inward vacuum position. The substrate is positioned in a pocket on the substrate carrier. The substrate carrier is a glass material.

公开(公告)号：US20200325576A1

公开(公告)日：2020-10-15

申请号：US16843347

申请日：2020-04-08

Applicant: Applied Materials, Inc.

Inventor： Karl J. ARMSTRONG ,  Ludovic GODET ,  Brian Alexander COHEN ,  Wayne MCMILLAN ,  James D. STRASSNER ,  Benjamin RIORDON

IPC: C23C16/40 ,  C23C14/04 ,  C23C16/04 ,  C23C16/455 ,  C23C14/08 ,  C23C14/06 ,  C23C14/14 ,  C23C16/24 ,  C23C16/34

Abstract: Embodiments of the present disclosure relate to forming multi-depth films for the fabrication of optical devices. One embodiment includes disposing a base layer of a device material on a surface of a substrate. One or more mandrels of the device material are disposed on the base layer. The disposing the one or more mandrels includes positioning a mask over of the base layer. The device material is deposited with the mask positioned over the base layer to form an optical device having the base layer with a base layer depth and the one or more mandrels having a first mandrel depth and a second mandrel depth.

公开(公告)号：US20240001398A1

公开(公告)日：2024-01-04

申请号：US18337246

申请日：2023-06-19

Applicant: Applied Materials, Inc.

Inventor： Russell Chin Yee TEO ,  Yingdong LUO ,  Ludovic GODET ,  Daihua ZHANG ,  Zhengping YAO ,  James D. STRASSNER

IPC: B05C5/02 ,  B05D3/00 ,  B05D3/06 ,  B05D7/24

CPC classification number: B05C5/0291 ,  B05D3/007 ,  B05D3/067 ,  B05D7/24 ,  B05D2203/30

Abstract: A method of forming a substrate carrier is provided. The method includes forming a first electrode over a first surface of a substrate, the first electrode arranged in a first pattern including a plurality of segments, wherein portions of the plurality of segments are spaced apart from each other by a plurality of gaps; and dispensing a plurality of droplets of a dielectric material over the substrate and into the plurality of gaps. The plurality of droplets includes a first droplet and a second droplet, the first droplet is dispensed onto a first location over the substrate, the second droplet is dispensed onto a second location over the substrate, a size of the first droplet is at least 10% larger than a size of the second droplet.

公开(公告)号：US20230203647A1

公开(公告)日：2023-06-29

申请号：US18111385

申请日：2023-02-17

Applicant: Applied Materials, Inc.

Inventor： Karl J. ARMSTRONG ,  Ludovic GODET ,  Brian Alexander COHEN ,  Wayne MCMILLAN ,  James D. STRASSNER ,  Benjamin B. RIORDON

IPC: C23C16/40 ,  C23C14/04 ,  C23C16/04 ,  C23C16/455 ,  C23C14/08 ,  C23C14/06 ,  C23C14/14 ,  C23C16/24 ,  C23C16/34 ,  H01L21/677 ,  C23C16/56

CPC classification number: C23C16/405 ,  C23C14/042 ,  C23C16/042 ,  C23C16/45525 ,  C23C14/083 ,  C23C16/407 ,  C23C14/0652 ,  C23C14/14 ,  C23C16/24 ,  C23C16/345 ,  C23C14/086 ,  H01L21/67766 ,  H01L21/67763 ,  C23C16/56 ,  G02B6/132

Abstract: Embodiments of the present disclosure relate to forming multi-depth films for the fabrication of optical devices. One embodiment includes disposing a base layer of a device material on a surface of a substrate. One or more mandrels of the device material are disposed on the base layer. The disposing the one or more mandrels includes positioning a mask over of the base layer. The device material is deposited with the mask positioned over the base layer to form an optical device having the base layer with a base layer depth and the one or more mandrels having a first mandrel depth and a second mandrel depth.

公开(公告)号：US20240075492A1

公开(公告)日：2024-03-07

申请号：US18506799

申请日：2023-11-10

Applicant: Applied Materials, Inc.

Inventor： Kangkang WANG ,  Yaseer Arafath AHAMED ,  Yige GAO ,  Benjamin B. RIORDON ,  Rami HOURANI ,  James D. STRASSNER ,  Ludovic GODET ,  Thinh NGUYEN

IPC: B05C1/00 ,  B05C1/02 ,  B05C13/00 ,  B05D1/00 ,  B05D5/06

CPC classification number: B05C1/006 ,  B05C1/027 ,  B05C13/00 ,  B05D1/002 ,  B05D5/061

Abstract: An optical device coating assembly is provided. The optical device coating assembly includes a substrate support operable to retain an optical device substrate. The coating assembly further includes a first actuator connected to the substrate support. The first actuator is configured to rotate the substrate support. The coating assembly includes a holder configured to hold a coating applicator against an edge of the optical device substrate when the optical device substrate is rotated on the substrate support and a second actuator operable to apply a force on the holder in a direction towards the substrate support. The second actuator is a constant force actuator.

公开(公告)号：US20220161396A1

公开(公告)日：2022-05-26

申请号：US17237533

申请日：2021-04-22

Applicant: Applied Materials, Inc.

Inventor： Yaseer Arafath AHAMED ,  Kangkang WANG ,  Benjamin B. RIORDON ,  James D. STRASSNER ,  Ludovic GODET

IPC: B25B11/00

Abstract: Embodiments described herein provide for devices and methods for retaining optical devices. The devices and methods described herein provide for retention of the substrate without contacting sensitive portions of the substrate. The devices and methods utilize retention pads or vacuum pins to contact the exclusion zones i.e., inactive areas of the substrate to retain the substrate and prevent the substrate from moving laterally. Additionally, a holding force retains the substrate in the vertical direction, without contacting the substrate. The methods provide for adjusting the devices to account for multiple geometries of the substrate. The methods further provide for adjusting the devices, such as adjusting a gap between the optical device and a suction pad, to alter the holding force of the devices on the optical devices.

公开(公告)号：US20230352336A1

公开(公告)日：2023-11-02

申请号：US18338443

申请日：2023-06-21

Applicant: Applied Materials, Inc.

Inventor： Benjamin B. RIORDON ,  James D. STRASSNER

IPC: H01L21/683 ,  C23C16/458 ,  H01L21/02 ,  H01L21/687 ,  C23C16/04 ,  B05C21/00 ,  C23C14/04

CPC classification number: H01L21/6838 ,  C23C16/4585 ,  H01L21/02266 ,  H01L21/68721 ,  C23C16/042 ,  B05C21/005 ,  C23C14/042

Abstract: Embodiments of the present disclosure are related to carrier assemblies that can clamp more than one optical device substrates and methods for forming the carrier assemblies. The carrier assembly includes a carrier, one or more substrates, and a mask. The carrier is magnetically coupled to the mask to retain the one or more substrates. The carrier assembly is used for supporting and transporting the one or more substrates during processing. The carrier assembly is also used for masking the one or more substrates during PVD processing. Methods for assembling the carrier assembly in a build chamber are described herein.

公开(公告)号：US20230227276A1

公开(公告)日：2023-07-20

申请号：US18151668

申请日：2023-01-09

Applicant: Applied Materials, Inc.

Inventor： Yaseer Arafath AHAMED ,  Neal RICKS ,  James D. STRASSNER ,  Kangkang WANG

IPC: B65G49/06 ,  B25J15/06 ,  B25J15/00

CPC classification number: B65G49/065 ,  B25J15/0028 ,  B25J15/0616 ,  B65G2203/041 ,  B65G2203/0216

Abstract: Embodiments of the present disclosure generally relate to optical devices. More specifically, embodiments described herein relate to apparatuses and methods for gripping optical devices. In an embodiment, an apparatus for gripping an optical device includes a base coupled to a proximal end of a stem extending from a bottom surface of the base. The apparatus also includes a plurality of arms movably coupled to the bottom surface of the base. The plurality of arms are coupled to an actuator operable to move the plurality of arms laterally along a X-Y plane parallel to the bottom surface of the base. In some embodiments, the apparatus includes a suction pad operable to provide a noncontact vertical suction force.

公开(公告)号：US20220212223A1

公开(公告)日：2022-07-07

申请号：US17456410

申请日：2021-11-24

Applicant: Applied Materials, Inc.

Inventor： Kangkang WANG ,  Yaseer Arafath AHAMED ,  Yige GAO ,  Benjamin B. RIORDON ,  Rami HOURANI ,  James D. STRASSNER ,  Ludovic GODET ,  Thinh NGUYEN

IPC: B05C1/00 ,  B05D1/00 ,  B05D5/06

Abstract: An optical device coating assembly is provided. The optical device coating assembly includes a substrate support operable to retain an optical device substrate. The coating assembly further includes a first actuator connected to the substrate support. The first actuator is configured to rotate the substrate support. The coating assembly includes a holder configured to hold a coating applicator against an edge of the optical device substrate when the optical device substrate is rotated on the substrate support and a second actuator operable to apply a force on the holder in a direction towards the substrate support. The second actuator is a constant force actuator.