Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
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Application No.: US17857185Application Date: 2022-07-05
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Publication No.: US20220336735A1Publication Date: 2022-10-20
- Inventor: Hui-Lin Wang , Wei Chen , Po-Kai Hsu , Yu-Ping Wang , Hung-Yueh Chen
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu City
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu City
- Priority: CN202010360779.3 20200430
- Main IPC: H01L43/12
- IPC: H01L43/12 ; H01F10/32 ; H01L43/02

Abstract:
A method for fabricating a semiconductor device includes the steps of: forming a first inter-metal dielectric (IMD) layer on a substrate; forming a first metal interconnection and a second metal interconnection in the first IMD layer; forming a channel layer on the first metal interconnection and the second metal interconnection; forming a magnetic tunneling junction (MTJ) stack on the channel layer; and removing the MTJ stack to form a MTJ.
Public/Granted literature
- US11950513B2 Semiconductor device and method for fabricating the same Public/Granted day:2024-04-02
Information query
IPC分类: