• Patent Title: LIGHT SOURCE, SPECTROSCOPIC ANALYSIS SYSTEM, AND SPECTROSCOPIC ANALYSIS METHOD
  • Application No.: US17906891
    Application Date: 2021-03-17
  • Publication No.: US20230168124A1
    Publication Date: 2023-06-01
  • Inventor: Yasutoshi UMEHARA
  • Applicant: Tokyo Electron Limited
  • Applicant Address: JP Tokyo
  • Assignee: Tokyo Electron Limited
  • Current Assignee: Tokyo Electron Limited
  • Current Assignee Address: JP Tokyo
  • Priority: JP 20051432 2020.03.23
  • International Application: PCT/JP2021/010880 2021.03.17
  • Date entered country: 2022-09-21
  • Main IPC: G01J3/10
  • IPC: G01J3/10 G01J3/02
LIGHT SOURCE, SPECTROSCOPIC ANALYSIS SYSTEM, AND SPECTROSCOPIC ANALYSIS METHOD
Abstract:
A spectroscopic analysis system includes a light source including a light emitting diode (51X), a wavelength converter (52X) configured to convert a wavelength of light output from the light emitting diode (51X), and a condenser (54X) configured to condense light output from the wavelength converter (52X), the light source including a mixing section configured to mix light output from the plurality of light emitting elements, and the wavelength of the light output from the plurality of light emitting elements being different, and a spectroscopic measurement section configured to acquire spectroscopic data by dispersing light reflected from an object on which the light source emits the light.
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