Invention Publication
- Patent Title: METASURFACE OPTICAL ELEMENT PREPARATION METHOD
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Application No.: US18316919Application Date: 2023-05-12
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Publication No.: US20230367037A1Publication Date: 2023-11-16
- Inventor: Lei SUN , Fei QIN , Xiangping LI
- Applicant: Shphotonics Ltd
- Applicant Address: CN Suzhou
- Assignee: Shphotonics Ltd
- Current Assignee: Shphotonics Ltd
- Current Assignee Address: CN Suzhou
- Priority: CN 2210530855.X 2022.05.16
- Main IPC: G02B1/00
- IPC: G02B1/00 ; B82Y20/00 ; G02B1/14

Abstract:
A metasurface optical element preparation method includes coating a nanomaterial over an end surface of a substrate, etching a part of the nanomaterial to the end surface of the substrate to obtain a discrete nano-pillar structure, filling a protection material in a gap of the discrete nano-pillar structure, and etching the protection material to cause a height of the protection material to be uniform and smaller than a height of the discrete nano-pillar structure.
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B1/00 | 按制造材料区分的光学元件;用于光学元件的光学涂层 |