Invention Publication
- Patent Title: FAST LISSAJOUS LOCK CONTROL AND SYNCHRONIZATION OF SCANNING AXES OF MICROELECTROMECHANICAL SYSTEM
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Application No.: US17823404Application Date: 2022-08-30
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Publication No.: US20240069329A1Publication Date: 2024-02-29
- Inventor: Norbert DRUML , Alberto GARCIA IZQUIERDO
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Main IPC: G02B26/10
- IPC: G02B26/10 ; G02B26/08 ; G01S7/481 ; H03L7/099

Abstract:
A method of synchronizing a first oscillation about a first axis with a second oscillation about a second axis includes: generating a first position signal that indicates a position of the first oscillation about the first axis; generating a second position signal that indicates a position of the second oscillation about the first axis; determining a phase difference between the first and the second position signals; comparing the phase difference to a threshold value to generate a comparison result; generating a first reference signal having a first frequency and a second reference signal having a second frequency; synchronizing the first oscillation to the first frequency and synchronizing the second oscillation to the second frequency; monitoring the comparison result; and synchronously triggering a start of the first reference signal and the second reference signal responsive to the comparison result indicating that the phase difference is less than the threshold value.
Public/Granted literature
- US11953676B2 Fast Lissajous lock control and synchronization of scanning axes of microelectromechanical system Public/Granted day:2024-04-09
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