Invention Grant
- Patent Title: Method for the manufacture of silicon injection plates and silicon plates produced thereby
- Patent Title (中): 制造硅注射板和硅板的方法
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Application No.: US131512Application Date: 1993-10-04
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Publication No.: US5421952APublication Date: 1995-06-06
- Inventor: Juergen Buchholz , Udo Jauernig , Alexandra Boehringer , Guenther Findler , Horst Muenzel
- Applicant: Juergen Buchholz , Udo Jauernig , Alexandra Boehringer , Guenther Findler , Horst Muenzel
- Applicant Address: DEX
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DEX
- Priority: DEX4233703.8 19921007
- Main IPC: B05B1/04
- IPC: B05B1/04 ; C23F1/00 ; F02M61/16 ; F02M61/18 ; B05B1/00
Abstract:
A method for fabricating silicon injection plates is both highly precise and particularly simple. The silicon injection plate is formed by an upper silicon plate having injection holes and a lower silicon plate having a through opening and channels. The lower silicon plate is fabricated by simultaneous, double-sided etching of silicon.
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