Invention Grant
- Patent Title: Emission microscope and method for continuous wavelength spectroscopy
- Patent Title (中): 发射显微镜和连续波长光谱法
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Application No.: US166011Application Date: 1998-10-02
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Publication No.: US6043882APublication Date: 2000-03-28
- Inventor: Ingrid De Wolf , Mahmoud Rasras
- Applicant: Ingrid De Wolf , Mahmoud Rasras
- Applicant Address: BEX Leuven
- Assignee: IMEC vzw
- Current Assignee: IMEC vzw
- Current Assignee Address: BEX Leuven
- Main IPC: G01J3/14
- IPC: G01J3/14 ; G01J3/28 ; G01J3/443 ; G01N21/88
Abstract:
A photon-emission microscope method and system are described which allow both emission spot localization and continuous spectral analysis of the emited light from the emission spot of a biased electronic circuit. The system includes an emission microscope, a detector and an in-line, direct vision, chromatically dispersing prismatic device. The microscope system advantageously uses only one detector which does not need to be moved to be able to detect both the localization and spectral images. In a particular embodiment, localization of emission spots may be performed using monochromatic light which allows sharp images of the electronic circuit despite the fact that the electronic circuit is viewed through the dispersing device. Further, an improved procedure is described for overcoming errors caused by saturation of the detector at high sensitivities.
Public/Granted literature
- US5527766A Method for epitaxial lift-off for oxide films utilizing superconductor release layers Public/Granted day:1996-06-18
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