Invention Grant
- Patent Title: Microelectronic mechanical systems (MEMS) switch and method of fabrication
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Application No.: US09993095Application Date: 2001-11-06
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Publication No.: US06535091B2Publication Date: 2003-03-18
- Inventor: Daniel Bechtle , Gordon C. Taylor , Ayre Rosen
- Applicant: Daniel Bechtle , Gordon C. Taylor , Ayre Rosen
- Main IPC: H01P110
- IPC: H01P110

Abstract:
A microelectronic mechanical systems (MEMS) switch includes a vane formed over a substrate for electrically coupling an input line to an output line formed on the substrate. The vane includes flexible hinges, which support the vane from the input line and allow the vane to rotate about a pivot axis. The substrate includes pull-down and pull-back electrodes to actuate the MEMS switch. The pull-back electrode allows the present invention to overcome stiction effects.
Public/Granted literature
- US20020075094A1 Microelectronic mechanical systems (MEMS) switch and method of fabrication Public/Granted day:2002-06-20
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