公开(公告)号：US06535091B2

公开(公告)日：2003-03-18

申请号：US09993095

申请日：2001-11-06

Applicant: Daniel Bechtle ,  Gordon C. Taylor ,  Ayre Rosen

Inventor： Daniel Bechtle ,  Gordon C. Taylor ,  Ayre Rosen

IPC: H01P110

CPC classification number: B81B3/0008 ,  B81B2201/018 ,  G11C23/00 ,  H01G5/40 ,  H01H59/0009 ,  H01P1/127 ,  H01P9/00

Abstract: A microelectronic mechanical systems (MEMS) switch includes a vane formed over a substrate for electrically coupling an input line to an output line formed on the substrate. The vane includes flexible hinges, which support the vane from the input line and allow the vane to rotate about a pivot axis. The substrate includes pull-down and pull-back electrodes to actuate the MEMS switch. The pull-back electrode allows the present invention to overcome stiction effects.