Invention Grant
- Patent Title: Storage capacitor for a DRAM
- Patent Title (中): 存储电容器用于DRAM
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Application No.: US09734466Application Date: 2000-12-11
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Publication No.: US06548846B2Publication Date: 2003-04-15
- Inventor: Hans Reisinger , Volker Lehmann , Reinhard Stengl , Hermann Wendt , Gerrit Lange , Harald Bachhofer , Martin Franosch , Herbert Schäfer
- Applicant: Hans Reisinger , Volker Lehmann , Reinhard Stengl , Hermann Wendt , Gerrit Lange , Harald Bachhofer , Martin Franosch , Herbert Schäfer
- Priority: DE19826025 19980610
- Main IPC: H01L27108
- IPC: H01L27108

Abstract:
A storage capacitor for a DRAM has a dielectric composed of silicon nitride and has at least two electrodes disposed opposite one another across the dielectric. A material having a high tunneling barrier between the Fermi level of the material and the conduction band of the dielectric is used for the electrodes. Suitable materials for the electrodes are metals such as platinum, tungsten and iridium or silicides.
Public/Granted literature
- US20020126543A1 STORAGE CAPACITOR FOR A DRAM Public/Granted day:2002-09-12
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