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US06548846B2 Storage capacitor for a DRAM 有权
存储电容器用于DRAM

Storage capacitor for a DRAM
Abstract:
A storage capacitor for a DRAM has a dielectric composed of silicon nitride and has at least two electrodes disposed opposite one another across the dielectric. A material having a high tunneling barrier between the Fermi level of the material and the conduction band of the dielectric is used for the electrodes. Suitable materials for the electrodes are metals such as platinum, tungsten and iridium or silicides.
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