Invention Grant
- Patent Title: Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layers
- Patent Title (中): 用于检测金属层化学机械抛光终点的方法和装置
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Application No.: US09874086Application Date: 2001-06-04
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Publication No.: US06652355B2Publication Date: 2003-11-25
- Inventor: Andreas Norbert Wiswesser , Judon Tony Pan , Boguslaw Swedek
- Applicant: Andreas Norbert Wiswesser , Judon Tony Pan , Boguslaw Swedek
- Main IPC: B24B4900
- IPC: B24B4900

Abstract:
An apparatus, as well as a method, determines an endpoint of chemical mechanical polishing a metal layer on a substrate. The method of the apparatus includes bringing a surface of a substrate into contact with a polishing pad that has a window; causing relative motion between the substrate and the polishing pad; directing a light beam through the window, the motion of the polishing pad relative to the substrate causing the light beam to move in a path across the substrate; detecting light beam reflections from the substrate and a retaining ring; generating reflection data associated with the light beam reflections; dividing the reflection data into a plurality of radial ranges; and identifying the predetermined pattern from the reflection data in the plurality of radial ranges to establish the endpoint.
Public/Granted literature
- US20010036793A1 Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layers Public/Granted day:2001-11-01
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