Invention Grant
- Patent Title: Thermal isolation using vertical structures
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Application No.: US09682894Application Date: 2001-10-30
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Publication No.: US06653239B2Publication Date: 2003-11-25
- Inventor: Kyle Lebouitz
- Applicant: Kyle Lebouitz
- Main IPC: H01L21306
- IPC: H01L21306

Abstract:
This invention relates to the construction of microfabricated devices and, in particular, to types of microfabricated devices requiring thermal isolation from the substrates upon which they are built. This invention discloses vertical thermal isolators and methods of fabricating the vertical thermal isolators. Vertical thermal isolators offer an advantage over thermal isolators of the prior art, which were substantially horizontal in nature, in that less wafer real estate is required for the use of the vertical thermal isolators, thereby allowing a greater density per unit area of the microfabricated devices.
Public/Granted literature
- US20020086540A1 Thermal isolation using vertical structures Public/Granted day:2002-07-04
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